Large Scale High Voltage 192+192 Row-Column Addressed CMUTs Made with Anodic Bonding

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Authors: Rune Sixten Grass, Kitty Steenberg, Andreas Spandet Havreland, Mathias Engholm, Erik Vilain Thomsen

Journal title: 2020 IEEE International Ultrasonics Symposium (IUS)

Journal publisher: IEEE

Published year: 2020

DOI identifier: 10.1109/ius46767.2020.9251824