Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures

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Authors: Andreas Spandet Havreland, Erik Vilain Thomsen

Journal title: I E E E Journal of Microelectromechanical Systems

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2021

DOI identifier: 10.1109/jmems.2021.3083935

ISSN: 1057-7157