Engineering of the spin on dopant process on silicon on insulator substrate

Summary

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Authors: Chiara Barri, Erfan Mafakheri, Luca Fagiani, Giulio Tavani, Andrea Barzaghi, Daniel Chrastina, Alexey Fedorov, Jacopo Frigerio, Mario Lodari, Francesco Scotognella, Elisa Arduca, Marco Abbarchi, Michele Perego, Monica Bollani

Journal title: Nanotechnology

Journal publisher: Institute of Physics Publishing

Published year: 2021

DOI identifier: 10.1088/1361-6528/abbdda

ISSN: 0957-4484