Thermal scanning probe lithography

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Authors: Edoardo Albisetti, Annalisa Calò, Alessandra Zanut, Xiaorui Zheng, Giuseppe Maria de Peppo, Elisa Riedo

Journal title: Nature Reviews Methods Primers

Journal number: 26628449

Journal publisher: Springer Nature

Published year: 2022

Published pages: 32

DOI identifier: 10.1038/s43586-022-00110-0

ISSN: 2662-8449