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Authors: Jean-Philippe Frimat, Bart Schurink, Regina Luttge
Journal title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Journal number: 35/6
Journal publisher: AVS Science and Technology Society
Published year: 2017
Published pages: 06GA01
DOI identifier: 10.1116/1.4991827
ISSN: 2166-2754