Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations

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Authors: J. Li, I. Tezsevin, M.J.M. Merkx, J.F.W. Maas, W.M.M. Kessels, T.E. Sandoval, A.J.M. Mackus

Journal title: Journal of Vacuum Science & Technology A

Journal number: 40

Journal publisher: American Institute of Physics

Published year: 2022

Published pages: 062409

DOI identifier: 10.1116/6.0002096

ISSN: 1520-8559