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Authors: L. Breyne, J. Lambrecht, M. Vanhoecke, P. Ossieur, G. Roelkens, J. Bauwelinck, X. Yin
Journal title: Proceedings of SPIE Photonex + Vacuum Technologies
Journal publisher: SPIE
Published year: 2021
DOI identifier: 10.1117/12.2601596