Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO

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Authors: Alberto Perrotta, Julian Pilz, Roland Resel, Oliver Werzer, Anna Maria Coclite

Journal title: Crystals

Journal number: 10/4

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 291

DOI identifier: 10.3390/cryst10040291

ISSN: 2073-4352