Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

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Authors: Julian Pilz, Alberto Perrotta, Paul Christian, Martin Tazreiter, Roland Resel, Günther Leising, Thomas Griesser, Anna Maria Coclite

Journal title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Journal number: 36/1

Journal publisher: American Institute of Physics

Published year: 2018

Published pages: 01A109

DOI identifier: 10.1116/1.5003334

ISSN: 0734-2101