On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

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Authors: Alberto Perrotta, Julian Pilz, Stefan Pachmajer, Antonella Milella, Anna Maria Coclite

Journal title: Beilstein Journal of Nanotechnology

Journal number: 10

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2019

Published pages: 746-759

DOI identifier: 10.3762/bjnano.10.74

ISSN: 2190-4286