Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study

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Authors: Alberto Perrotta, Julian Pilz, Antonella Milella, Anna Maria Coclite

Journal title: Applied Surface Science

Journal number: 483

Journal publisher: Elsevier BV

Published year: 2019

Published pages: 10-18

DOI identifier: 10.1016/j.apsusc.2019.03.122

ISSN: 0169-4332