Universal software for the real-time control of sequential processing techniques

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Authors: Julian Pilz, Martin Tazreiter, Anna Maria Coclite

Journal title: Journal of Vacuum Science & Technology A

Journal number: 37/6

Journal publisher: American Institute of Physics

Published year: 2019

Published pages: 063201

DOI identifier: 10.1116/1.5125052

ISSN: 0734-2101