ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”

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Authors: Julian Pilz, Alberto Perrotta, Günther Leising, Anna Maria Coclite

Journal title: physica status solidi (a)

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2019

Published pages: 1900256

DOI identifier: 10.1002/pssa.201900256

ISSN: 1862-6300