Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

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Authors: Taher Abu Ali, Julian Pilz, Philipp Schäffner, Markus Kratzer, Christian Teichert, Barbara Stadlober, Anna Maria Coclite

Journal title: physica status solidi (a)

Journal number: 217/21

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2020

Published pages: 2000319

DOI identifier: 10.1002/pssa.202000319

ISSN: 1862-6300