Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors

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Authors: A. Tajalli, E. Canato, A. Nardo, M. Meneghini, A. Stockman, P. Moens, E. Zanoni, G. Meneghesso

Journal title: Microelectronics Reliability

Journal number: 88-90

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 572-576

DOI identifier: 10.1016/j.microrel.2018.06.037

ISSN: 0026-2714