Vertical Leakage in GaN-on-Si Stacks Investigated by a Buffer Decomposition Experiment

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Authors: Alaleh Tajalli, Matteo Borga, Matteo Meneghini, Carlo De Santi, Davide Benazzi, Sven Besendörfer, Roland Püsche, Joff Derluyn, Stefan Degroote, Marianne Germain, Riad Kabouche, Idriss Abid, Elke Meissner, Enrico Zanoni, Farid Medjdoub, Gaudenzio Meneghesso

Journal title: Micromachines

Journal number: 11/1

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 101

DOI identifier: 10.3390/mi11010101

ISSN: 2072-666X