CH4 Adsorption Probability on GaN(0001) and (000−1) during Metalorganic Vapor Phase Epitaxy and Its Relationship to Carbon Contamination in the Films

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Authors: Akira Kusaba, Guanchen Li, Pawel Kempisty, Michael von Spakovsky, Yoshihiro Kangawa

Journal title: Materials

Journal number: 12/6

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 972

DOI identifier: 10.3390/ma12060972

ISSN: 1996-1944