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Authors: Matteo Meneghini, Alaleh Tajalli, Peter Moens, Abhishek Banerjee, Enrico Zanoni, Gaudenzio Meneghesso
Journal title: Materials Science in Semiconductor Processing
Journal number: 78
Journal publisher: Pergamon Press
Published year: 2018
Published pages: 118-126
DOI identifier: 10.1016/j.mssp.2017.10.009
ISSN: 1369-8001