In Operando Optical Tracking of Oxygen Vacancy Migration and Phase Change in few Nanometers Ferroelectric HZO Memories

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Authors: Atif Jan, Thomas Rembert, Sunil Taper, Joanna Symonowicz, Nives Strkalj, Taehwan Moon, Yun Seong Lee, Hagyoul Bae, Hyun Jae Lee, Duk-Hyun Choe, Jinseong Heo, Judith MacManus-Driscoll, Bartomeu Monserrat, Giuliana Di Martino

Journal title: Advanced Functional Materials

Journal publisher: Wiley-VCH GmbH

Published year: 2023

DOI identifier: 10.1002/adfm.202214970

ISSN: 1616-3028