Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides

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Authors: Martin Hubert Peter Pfeiffer, Clemens Herkommer, Junqiu Liu, Tiago Morais, Michael Zervas, Michael Geiselmann, Tobias J. Kippenberg

Journal title: IEEE Journal of Selected Topics in Quantum Electronics

Journal number: 24/4

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2018

Published pages: 1-11

DOI identifier: 10.1109/JSTQE.2018.2808258

ISSN: 1077-260X