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Authors: Yanis Taege, Gerardo González-Cerdas, Felix Jund, Hans Zappe, Caglar Ataman
Journal title: Journal of Micromechanics and Microengineering
Journal publisher: Institute of Physics Publishing
Published year: 2021
DOI identifier: 10.1088/1361-6439/ac2d9d
ISSN: 0960-1317
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