Summary
Micro-Electro-Mechanical-Systems (MEMS) are highly miniaturized systems composed of integrated circuits, sensors and actuators. Examples of such MEMS devices are accelerometers, gyroscopes, microphones, pressure and magnetic field sensors, which are often integrated into...
More information & hyperlinks
Web resources: | https://www.epfl.ch/labs/lmis1/projects/erc-mems/ |