Thermal scanning probe lithography—a review

Summary

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Authors: Samuel Tobias Howell, Anya Grushina, Felix Holzner, Juergen Brugger

Journal title: Microsystems & Nanoengineering

Journal number: 6/1

Journal publisher: Springer Nature

Published year: 2020

DOI identifier: 10.1038/s41378-019-0124-8

ISSN: 2055-7434