Fabrication of plasmonic structures with well-controlled nanometric features: A comparison between lift-off and ion etching

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Authors: Abasahl B, Santschi Christian, Raziman T. V, Martin Olivier J. F.

Journal title: Nanotechnology

Journal publisher: Institute of Physics Publishing

Published year: 2021

DOI identifier: 10.1088/1361-6528/ac1a93

ISSN: 0957-4484