Optimization of reactive ion beam sputtered Ta2O5 for III–V compounds

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Authors: Jarno Reuna, Marianna Vuorinen, Riku Isoaho, Arto Aho, Severi Mäkelä, Arttu Hietalahti, Elina Anttola, Antti Tukiainen, Mircea Guina

Journal title: Thin Solid Films

Journal publisher: Elsevier Sequoia

Published year: 2022

DOI identifier: 10.1016/j.tsf.2022.139601

ISSN: 0040-6090