Use of nanostructured alumina thin films in multilayer anti-reflective coatings

Summary

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Authors: Jarno Reuna, Arto Aho, Riku Isoaho, Marianna Raappana, Timo Aho, Elina Anttola, Arttu Hietalahti, Antti Tukiainen, Mircea Guina

Journal title: Nanotechnology

Journal number: 32/21

Journal publisher: Institute of Physics Publishing

Published year: 2021

Published pages: 215602

DOI identifier: 10.1088/1361-6528/abe747

ISSN: 0957-4484