Nanoscale Patterning of Zinc Oxide from Zinc Acetate Using Electron Beam Lithography for the Preparation of Hard Lithographic Masks

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Authors: Ahmad Chaker, Hayden R. Alty, Peng Tian, Anastasios Kotsovinos, Grigore A. Timco, Christopher A. Muryn, Scott M. Lewis, Richard E. P. Winpenny

Journal title: ACS Applied Nano Materials

Journal number: 4/1

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 406-413

DOI identifier: 10.1021/acsanm.0c02756

ISSN: 2574-0970