An in-situ method for protecting internal cracks/pores from ion beam damage and reducing curtaining for TEM sample preparation using FIB

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Authors: X. L. Zhong, S. J. Haigh, X. Zhou, and P. J. Withers

Journal title: Ultramicroscopy

Journal publisher: Elsevier BV

Published year: 2020

Published pages: vol. 219

DOI identifier: 10.1016/j.ultramic.2020.113135

ISSN: 0264-1275