Block Copolymer Approach toward Selective Atomic-Layer Deposition of ZnO Films

Summary

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Authors: Anish Philip, Yujiao Dong, Jaana Vapaavuori*, Maarit Karppinen*

Journal title: Advanced Engineering Materials

Journal number: 12.10.2023

Journal publisher: John Wiley & Sons Ltd.

Published year: 2023

DOI identifier: 10.1002/adem.202300937

ISSN: 1438-1656