An argon ion beam milling process for native AlO x layers enabling coherent superconducting contacts

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Authors: Lukas Grünhaupt, Uwe von Lüpke, Daria Gusenkova, Sebastian T. Skacel, Nataliya Maleeva, Steffen Schlör, Alexander Bilmes, Hannes Rotzinger, Alexey V. Ustinov, Martin Weides, Ioan M. Pop

Journal title: Applied Physics Letters

Journal number: 111/7

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 072601

DOI identifier: 10.1063/1.4990491

ISSN: 0003-6951