The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon

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Authors: Cliona Shakespeare; Teemu Loippo; Henri Lyyra; Juha T. Muhonen

Journal title: Materials for Quantum Technology

Journal number: 26334356

Journal publisher: IOP Publishing

Published year: 2021

DOI identifier: 10.1088/2633-4356/ac3e42

ISSN: 2633-4356