Summary
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Authors: B Bagheri, J Teunissen, U Ebert, M M Becker, S Chen, O Ducasse, O Eichwald, D Loffhagen, A Luque, D Mihailova, J M Plewa, J van Dijk, M Yousfi
Journal title: Plasma Sources Science and Technology
Journal number: 27/9
Journal publisher: Institute of Physics Publishing
Published year: 2018
Published pages: 095002
DOI identifier: 10.1088/1361-6595/aad768
ISSN: 1361-6595