Effect of surface stress induced curvature on the eigenfrequencies of microcantilever plates

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Authors: J. J. Ruz, V. Pini, O. Malvar, P. M. Kosaka, M. Calleja, J. Tamayo

Journal title: AIP Advances

Journal number: 8/10

Journal publisher: American Institute of Physics Inc.

Published year: 2018

Published pages: 105213

DOI identifier: 10.1063/1.5053561

ISSN: 2158-3226