Effect of isopropanol on gold assisted chemical etching of silicon microstructures

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Authors: L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni

Journal title: Microelectronic Engineering

Journal number: 177

Journal publisher: Elsevier BV

Published year: 2017

Published pages: 59-65

DOI identifier: 10.1016/j.mee.2017.02.008

ISSN: 0167-9317