High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching

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Authors: Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni

Journal title: Advances in Patterning Materials and Processes XXXIV

Journal publisher: SPIE

Published year: 2017

Published pages: 101460L

DOI identifier: 10.1117/12.2258007