High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

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Authors: L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs

Journal title: Microelectronic Engineering

Journal number: 176

Journal publisher: Elsevier BV

Published year: 2017

Published pages: 6-10

DOI identifier: 10.1016/j.mee.2016.12.032

ISSN: 0167-9317