Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication

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Authors: Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs

Journal title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Journal number: 35/6

Journal publisher: AVS Science and Technology Society

Published year: 2017

Published pages: 06G302

DOI identifier: 10.1116/1.4991807

ISSN: 2166-2754