Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

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Authors: Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs

Journal title: Microelectronic Engineering

Journal number: 192

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 19-24

DOI identifier: 10.1016/j.mee.2018.01.027

ISSN: 0167-9317