Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica

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Authors: Monu Kaushik, César Leroy, Zixuan Chen, David Gajan, Elena Willinger, Christoph R. Müller, Franck Fayon, Dominique Massiot, Alexey Fedorov, Christophe Copéret, Anne Lesage, Pierre Florian

Journal title: Chemistry of Materials

Journal number: 33(9)

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 3335-3348

DOI identifier: 10.1021/acs.chemmater.1c00516

ISSN: 0897-4756