Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica

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Authors: Monu Kaushik; César Leroy; Zixuan Chen; David Gajan; Elena Willinger; Christoph R. Müller; Franck Fayon; Dominique Massiot; Alexey Fedorov; Christophe Copéret; Anne Lesage; Pierre Florian

Journal title: "Chemistry of Materials, 2021, 33 (9), pp.3335-3348. ⟨10.1021/acs.chemmater.1c00516⟩"

Journal number: 2

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 3335-3348

DOI identifier: 10.26434/chemrxiv.13618982

ISSN: 0897-4756