Non-destructive X-Ray imaging of patterned Delta-Layer devices in silicon

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Authors: D'Anna, Nicolò; Ferreira Sanchez, Dario; Matmon, Guy; Bragg, Jamie; Constantinou, Procopios C.; Stock, Taylor J.Z.; Fearn, Sarah; Schofield, Steven R.; Curson, Neil J.; Bartkowiak, Marek; Soh, Y.; Grolimund, Daniel; Gerber, Simon; Aeppli, Gabriel

Journal title: Advanced Electronic Materials

Journal publisher: Wiley Online Library

Published year: 2023

DOI identifier: 10.1002/aelm.202201212

ISSN: 2199-160X