Liquid atomic layer deposition as emergent technology for the fabrication of thin films

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Authors: Octavio Graniel; Josep Puigmartí-Luis; David Muñoz-Rojas

Journal title: Dalton Transactions

Journal number: 1

Journal publisher: The Royal Society of Chemistry

Published year: 2021

DOI identifier: 10.1039/d1dt00232e

ISSN: 1477-9234