Nano–opto-electro-mechanical switches operated at CMOS-level voltages

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Authors: Christian Haffner, Andreas Joerg, Michael Doderer, Felix Mayor, Daniel Chelladurai, Yuriy Fedoryshyn, Cosmin Ioan Roman, Mikael Mazur, Maurizio Burla, Henri J. Lezec, Vladimir A. Aksyuk, Juerg Leuthold

Journal title: Science

Journal number: 366/6467

Journal publisher: American Association for the Advancement of Science

Published year: 2019

Published pages: 860-864

DOI identifier: 10.1126/science.aay8645

ISSN: 0036-8075