Laser Processing for 3D junctionless transistor fabrication

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Authors: D. Bosch, P. Acosta Alba, S. Kerdiles, V. Benevent, C. Perrot, J. Lassarre, J. Richy, J. Lacord, B. Sklenard, L. Brunet, P. Batude, C. Fenouillet-BĂ©ranger, D. Lattard, J. P. Colinge, F. Balestra, F. Andrieu

Journal title: IEEE S3S conference

Journal publisher: IEEE

Published year: 2019