Chemical vapor deposition: a potential tool for wafer scale growth of two-dimensional layered materials

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Authors: Mohammed El Hammoumi; Vivek Chaudhary; P Neugebauer; A El Fatimy

Journal title: Journal of Physics D: Applied Physics

Journal number: vol. 55, issue 47

Journal publisher: IOP Publishing Ltd

Published year: 2022

Published pages: 18 p.

DOI identifier: 10.1088/1361-6463/ac928d

ISSN: 1361-6463