High- Q Silicon Nitride Drum Resonators Strongly Coupled to Gates

Summary

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Authors: Xin Zhou, Srisaran Venkatachalam, Ronghua Zhou, Hao Xu, Alok Pokharel, Andrew Fefferman, Mohammed Zaknoune, Eddy Collin

Journal title: Nano Letters

Journal publisher: American Chemical Society

Published year: 2021

DOI identifier: 10.1021/acs.nanolett.1c01477

ISSN: 1530-6984