Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultra-violet optical lithography

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Authors: D. Benedikovic, C. Alonso-Ramos, S. Guerber, D. Pérez-Galacho, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien

Journal publisher: SPIE Photonics Europe

Published year: 2018