High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography

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Authors: CARLOS A. ALONSO-RAMOS, DANIEL BENEDIKOVICH, DIEGO PÉREZ-GALACHO, SYLVAIN GUERBER, VLADYSLAV VAKARIN, GUILLAUME MARCAUD, XAVIER LE ROUX, ERIC CASSAN, DELPHINE MARRIS-MORINI, PAVEL CHEBEN, FRÉDÉRIC BOEUF, CHARLES BAUDOT, LAURENT VIVIEN

Journal publisher: PIE Photonics West

Published year: 2018