Functional oxide induced strain for silicon photonics applications

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Authors: G. MARCAUD, S. MATZEN, C. ALONSO-RAMOS, X. LE ROUX, M. BERCIANO, P. DAMAS, T. MAROUTIAN, G. AGNUS, L. LARGEAU, E. CASSAN, D. MARRIS-MORINI, P. LECOEUR, L. VIVIEN

Journal publisher: SPIE Optics & Optoelectronics

Published year: 2017