Functional oxides induced strain for silicon photonics applications

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Guillaume Marcaud, Sylvia Matzen, Carlos Alonso-Ramos, Xavier Le Roux, Mathias Berciano,Valérie Pillard, Pedro Damas, Thomas Maroutian, Guillaume Agnus, Ludovic Largeau, Eric Cassan, Delphine Marris-Morini, Philippe Lecoeur, Laurent Vivien

Journal publisher: SPIE

Published year: 2017